Low-frequency band gap in cross-like holey phononic crystal strip
Low-frequency band gap in cross-like holey phononic crystal strip
复制标题
十字形多孔声子晶体条的低频带隙
DOI：
10.1088/1361-6463/aa9ec1
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发表时间：
2018-01-31
影响因子：
3.4
通讯作者：
Laude, Vincent
中科院分区：
文献类型：
--
作者：
Jiang, Shan;Hu, Hongping;Laude, Vincent
提出了一种用于微机电系统（MEMS）弹性波控制的硅基十字形多孔声子晶体（PnC）带。其目标是在低频下以轻质结构获得宽带隙。在这方面，不同的面内和面外的几何参数的影响进行了讨论。设计后，间隙到中间间隙的比例为47%，获得了中间填充率的固体材料和小厚度的带。带隙可以移动到极低的频率范围，同时保持条显着小于以前报道的PnC条。通过有限数量的周期的传输属性同意以及无限系统的带结构。例如，所提出的PnC带可以用作MEMS中弹性波谐振器的隔离锚。
A silicon-based cross-like holey phononic crystal (PnC) strip is proposed for the control of elastic waves in the field of micro-electro-mechanical systems (MEMS). The goal is to obtain a broad bandgap at low frequencies with a lightweight structure. In this respect, the effects of varying the in-plane and the out-of-plane geometry parameters are discussed. After design, a gap-to-midgap ratio of 47% is obtained with an intermediate filling fraction of the solid material and a small thickness of the strip. The band gap can be moved to an extremely low frequency range while keeping the strip significantly smaller than previously reported PnC strips. The transmission property through a finite number of periods agrees well with the band structure of the infinite system. The proposed PnC strip could, for instance, be used as an isolating anchor for elastic wave resonators in MEMS.