Excimer emission characteristics in high-pressure microgap Discharge excited by microwave

Excimer emission characteristics in high-pressure microgap Discharge excited by microwave
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高压微间隙准分子发射特性 微波激发放电

DOI:
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发表时间:
2005
期刊:
Proceedings of Plasma Science Symposium 2005 and the 22^<nd> Symposium on Plasma Processing (Nagoya)
影响因子:
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通讯作者:
A.Kono
A.Kono
中科院分区:
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文献类型:
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作者:
J.Wang;M.Aramaki;A.Kono

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