Fabrication of 5-GHz-band SAW filter with atomically-flat-surface AlN on sapphire
Fabrication of 5-GHz-band SAW filter with atomically-flat-surface AlN on sapphire
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DOI：
10.1109/ultsym.2004.1417702
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发表时间：
2004-12
期刊：
影响因子：
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通讯作者：
K. Uehara;C. Yang;T. Shibata;S. Kim;S. Kameda;H. Nakase;K. Tsubouchi
中科院分区：
文献类型：
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作者：
K. Uehara;C. Yang;T. Shibata;S. Kim;S. Kameda;H. Nakase;K. Tsubouchi
在原子级平坦表面（0001）氮化铝/（0001）蓝宝石（AlN/Al/sub 2/O/sub 3/）组合上制备了用于移动的通信的5 GHz频段声表面波（SAW）滤波器。SAW器件的制作使用电子束光刻和剥离的方法。原子级平坦表面的AlN膜被用来减少SAW传播损耗。制作的SAW滤波器的中心频率为5.18 GHz。SAW速度为5688米/秒，在归一化厚度波数（kH）为9.9。有效耦合系数为0.1%，延迟温度系数为9 ppm//spl deg/C，kH为5.9。在5.18 GHz处，SAW传播损耗为0.0053 dB。原子级平坦表面的（0001）AlN/（0001）Al/sub 2/O/sub 3/复合材料有望用于移动的通信中的5 GHz频段SAW滤波器。
5-GHz-band surface acoustic wave (SAW) filters for mobile communications were fabricated on an atomically-flat-surface (0001)aluminum nitride/(0001)sapphire (AlN/Al/sub 2/O/sub 3/) combination. The SAW devices were fabricated using electron beam lithography and a lift-off method. Atomically-flat-surface AIN films were used to reduce SAW propagation loss. The center frequency of the fabricated SAW filter was 5.18 GHz. SAW velocity was 5688 m/s at normalized thickness by wave number (kH) of 9.9. The effective coupling coefficient was 0.1% and temperature-coefficient of delay was 9 ppm//spl deg/C at kH of 5.9. The SAW propagation loss was 0.0053 dB at 5.18 GHz. The atomically-flat-surface (0001)AlN/(0001)Al/sub 2/O/sub 3/ combination is promising for use in 5-GHz-band SAW filters for application to mobile communications.