Study of deposition of gas sensing films on quartz crystal microbalance using an ultrasonic atomizer
Study of deposition of gas sensing films on quartz crystal microbalance using an ultrasonic atomizer
复制标题
DOI：
10.1016/j.snb.2004.05.063
复制
发表时间：
2005-03-28
影响因子：
8.4
通讯作者：
Moriizumi, T
中科院分区：
文献类型：
--
作者：
Muñoz-Aguirre, S;Nakamoto, T;Moriizumi, T
提出了一种在石英晶体微天平电极上沉积气敏薄膜的新方法。该方法是基于通过超声波雾化器用敏感材料产生溶液的细雾。雾气通过干燥的气流输送到石英衬底，从而使其沉积。并与喷涂法制作的传感器的响应进行了比较。结果表明，即使是喷雾沉积在抛光金电极上不稳定的液体膜，如阿皮宗L，也可以用雾化器稳定沉积，提高了传感器响应的重复性和灵敏度。(C)2004爱思唯尔B.V.保留所有权利。
A novel method for depositing gas sensing films on quartz crystal microbalance electrodes was developed. The method is based on the production of a fine mist of the solution with the sensing material by means of an ultrasonic atomizer. The mist is transported by a dry air flow to the quartz substrate allowing its deposition. The responses of the sensors are compared with those fabricated by spray coating method. It was found that even liquid films such as Apiezon L that were not stably deposited on polished gold electrodes by the spray method could be stably deposited using the atomizer, and an improvement of the reproducibility and sensitivity of the sensor response was achieved. (c) 2004 Elsevier B.V. All rights reserved.