NdFeB thick films prepared by tape casting
NdFeB thick films prepared by tape casting
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流延法制备NdFeB厚膜
DOI：
10.1016/s0304-8853(03)00285-3
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发表时间：
2003
影响因子：
2.7
通讯作者：
J. Töpfer
中科院分区：
文献类型：
--
作者：
B. Pawlowski;S. Schwarzer;A. Rahmig;J. Töpfer
用流延法制备了厚度在10 0~80 0μm之间的NdFeB薄膜，浆料中含有84~95wt%的商用NdFeB粉末(MQP-B、-Q和-S)。在120°C固化后，得到了无孔磁性薄膜。薄膜的剩磁在350-450mT之间，矫顽力在300-800kA/m之间，这取决于所使用的MQP粉末的类型。讨论了薄膜的磁性与薄膜成分和磁性材料类型的关系。对于MEMS应用，厚膜采用极间距为1 mm的多极条纹图案进行磁化。用霍尔探头测量了薄膜表面的感应强度，并与理论计算结果进行了比较。结果表明，无论薄膜厚度如何，薄膜都是完全磁化的。流延NdFeB厚膜在微系统或致动器中有很好的应用前景。磁体元件的小型化是电磁微系统发展的关键问题之一，因此需要用磁性厚膜元件取代小的烧结磁体。其他应用包括编码器。
NdFeB films of thickness between 100 and 800μm were prepared by tape casting of a slurry containing 84–95wt% of commercial NdFeB powder (MQP-B, -Q and -S). After curing the flexible green tapes at 120°C non-porous magnetic films are obtained. The remanence of the films is in the range of 350–450mT and the coercivity is between 300 and 800kA/m depending on the type of MQP powder used. The magnetic properties of the films are discussed in relation to film composition and type of magnetic material. For MEMS applications the thick films are magnetized with a multi-pole stripe pattern with 1mm pole pitch. The induction at the surface of the films was measured with a Hall probe and compared to theoretical calculations. The results indicate that the films are completely magnetized regardless of the film thickness. Tape-casted NdFeB thick films are promising candidates for applications in micro-systems or actuators. Miniaturization of the magnet components is one of the key issues in the development of electromagnetic micro-systems, thus creating a need for replacement of small sintered magnets by magnetic thick film components. Other applications include encoders.