Effect of oxygen chemisorption on the electrical conductivity of zinc oxide films prepared by a spray pyrolysis method
Effect of oxygen chemisorption on the electrical conductivity of zinc oxide films prepared by a spray pyrolysis method
复制标题
氧化学吸附对喷雾热解法制备氧化锌薄膜电导率的影响
DOI：
10.1016/0955-2219(91)90061-4
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发表时间：
1991
期刊：
影响因子：
--
通讯作者：
J. Baumard
中科院分区：
文献类型：
--
作者：
F. Caillaud;Agnès Smith;J. Baumard
用喷雾热解法在电子工业常用的氧化铝衬底上沉积了2-3 μm厚的氧化锌薄膜。测量了它们在氮气、空气和氧气中的电阻率-温度特性。这些数据被解释的表面反应，涉及锌和吸附的氧原子以不同的形式。与一个类似的材料在散装形式的电响应的比较也进行了检查。
Zinc oxide films (2–3 μm thick) have been deposited on alumina substrates currently used for electronic applications by a spray pyrolysis method. Their electrical resistivity-temperature characteristics were measured in nitrogen, air and oxygen. The data are explained by surface reactions involving zinc and adsorbed oxygen atoms in different forms. The comparison with the electrical response of a similar material in the bulk form is also examined.