Digital correlation of grainy shadow images for surface profile measurement
Digital correlation of grainy shadow images for surface profile measurement
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用于表面轮廓测量的粒状阴影图像的数字关联
DOI：
10.1016/j.ijleo.2005.10.012
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发表时间：
2006
期刊：
影响因子：
3.1
通讯作者：
F. Lagattu
中科院分区：
文献类型：
--
作者：
J. Brillaud;F. Lagattu
本文讨论了一种将结构光投影与数字相关技术相结合的光学方法。这种方法可以测量约20平方毫米的物体表面的全场轮廓。旋转平面上的测试已经进行，以量化的方法的能力。结果表明，这种技术导致约1μm的空间分辨率约为半毫米的精度。还介绍了微雕刻物体和聚合物样品裂纹尖端的轮廓测量。结果证明，该技术仍然有效，即使在存在重要的高度坡度。
An optical method, combining the projection of a structured light pattern with the digital correlation technique, is discussed in this paper. This method allows measurement of full-field profile on object surface of about 20mm square size. Tests on a rotated plane surface have been performed in order to quantify the method capabilities. It is shown that this technique leads to an accuracy of about 1μm for a spatial resolution of around half a millimeter. Profile measurements of a micro-engraved object and at the crack tip of a polymer sample are also presented. Results give proof that this technique remains efficient even in presence of important height slope.