Combining multi-step imprinting with the in-plane compression method
Combining multi-step imprinting with the in-plane compression method
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DOI：
10.35848/1347-4065/ab79ef
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发表时间：
2020-06-01
影响因子：
1.5
通讯作者：
Tsumori, Fujio
中科院分区：
文献类型：
--
作者：
Miyata, Tsuyoshi;Tokumaru, Kazuki;Tsumori, Fujio
在这项研究中，提出并开发了一种微图案化工艺，以获得物体表面的各种功能特性。纳米压印光刻技术具有精度高、成本低、操作简便等优点，近年来受到广泛关注。然而，当使用该方法时，在脱模期间可能发生问题，例如在工艺期间高纵横比图案的破坏。也几乎不可能形成悬垂图案。为了克服这些问题，我们提出了一种多步压印工艺与面内压缩方法。使用多步压印可以产生分层多尺度图案，并且通过使用面内压缩方法可以增加压印图案的纵横比。将这两种方法结合起来，得到了一个具有高纵横比的多尺度层次图案。实验结果表明了该方法的有效性。(C)2020日本应用物理学会
In this study, a micro-patterning process is proposed and developed in order to obtain various functional properties on the surface of an object. Nano imprint lithography has recently been the focus of much attention, because of advantages such as high accuracy, low cost, and ease of operation. However, problems can occur during demolding when using this method, such as the destruction of high aspect patterns during the process. It is also, almost impossible to form an over-hanging pattern. In order to overcome these problems, we propose a multi-step imprinting process with an in-plane compression method. A hierarchical multi-scale pattern can be produced using multi-step imprinting, and the aspect ratio of the imprinted pattern can be increased by using the in-plane compression method. A hierarchical multi-scale pattern with a high aspect ratio was produced by combining the two methods. The effectiveness of the proposed method is demonstrated by the results of the experimentation. (C) 2020 The Japan Society of Applied Physics