Surface sensitivity in scanning transmission x-ray microspectroscopy using secondary electron detection.
Surface sensitivity in scanning transmission x-ray microspectroscopy using secondary electron detection.
复制标题
使用二次电子检测的扫描透射 X 射线显微光谱的表面灵敏度。
DOI：
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发表时间：
2010
影响因子：
1.6
通讯作者：
Rainer H. Fink
中科院分区：
文献类型：
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作者：
C. Hub;S. Wenzel;Jörg Raabe;Harald Ade;Rainer H. Fink
成功地集成电子检测到现有的扫描透射x射线显微光谱仪（STXM）在瑞士光源被证明。在使用光电倍增管的传统x射线检测中，STXM主要提供体灵敏度和高横向分辨率。然而，通过实现通道电子倍增器，可以通过检测样品在共振激发下发射的二次电子来建立表面灵敏度。我们描述了实验设置，并讨论了几个相关的方面，特别是方案，以纠正自吸收在标本由于背照在较厚的薄膜的情况下。
The successful integration of electron detection into an existing scanning transmission x-ray microspectroscope (STXM) at the Swiss Light Source is demonstrated. In conventional x-ray detection using a photomultiplier, STXM offers mainly bulk sensitivity combined with high lateral resolution. However, by implementation of a channeltron electron multiplier, the surface sensitivity can be established by the detection of secondary electrons emitted from the sample upon resonant excitation. We describe the experimental setup and discuss several relevant aspects, in particular the schemes to correct for self-absorption in the specimen due to back illumination in case of thicker films.