Miniature all-silica optical fiber pressure sensor with an ultrathin uniform diaphragm
Miniature all-silica optical fiber pressure sensor with an ultrathin uniform diaphragm
复制标题
DOI：
10.1364/oe.18.009006
复制
发表时间：
2010-04-26
期刊：
影响因子：
3.8
通讯作者：
Wang, Xingwei
中科院分区：
文献类型：
--
作者：
Wang, Wenhui;Wu, Nan;Wang, Xingwei
提出了一种基于法布里-珀罗（FP）干涉原理的全石英微型光纤压力/声传感器。光纤针尖的端面与其上的石英薄膜片构成FP结构。通过从具有热氧化物层的商业硅晶片上蚀刻掉硅衬底来制造均匀且薄的二氧化硅隔膜。薄膜直接热粘合到光纤的端面，从而产生法布里-珀罗腔。成功地键合了厚度为1 ~ 3 μ m的薄膜。该传感器在测量过程中具有良好的线性度和迟滞特性。用0.75 μ m厚的膜片通过后二氧化硅蚀刻减薄的传感器被证明具有11 nm/kPa的灵敏度。这种新型传感器具有很大的潜力，可作为非侵入式压力传感器用于各种传感应用。(C)2010年美国光学学会
This paper presents an all-silica miniature optical fiber pressure/acoustic sensor based on the Fabry-Perot (FP) interferometric principle. The endface of the etched optical fiber tip and silica thin diaphragm on it form the FP structure. The uniform and thin silica diaphragm was fabricated by etching away the silicon substrate from a commercial silicon wafer that has a thermal oxide layer. The thin film was directly thermally bonded to the endface of the optical fiber thus creating the Fabry-Perot cavity. Thin films with a thickness from 1 mu m to 3 mu m have been bonded successfully. The sensor shows good linearity and hysteresis during measurement. A sensor with 0.75 mu m-thick diaphragm thinned by post silica etching was demonstrated to have a sensitivity of 11 nm/kPa. The new sensor has great potential to be used as a non-intrusive pressure sensor in a variety of sensing applications. (C) 2010 Optical Society of America