A Portable, Benchtop Photolithography System Based on a Solid-State Light Source
A Portable, Benchtop Photolithography System Based on a Solid-State Light Source
复制标题
DOI：
10.1002/smll.201101209
复制
发表时间：
2011-11-18
期刊：
影响因子：
13.3
通讯作者：
Odom, Teri W.
中科院分区：
文献类型：
--
作者：
Huntington, Mark D.;Odom, Teri W.
描述了一种基于紫外发光二极管 (LED) 固态光源的便携式紧凑型光刻系统。固态光刻可以在各种长度范围内实现高质量图案，而成本只是接触掩模对准器的一小部分。可以轻松创建 2D 纳米级和 1D 微米级图案。
A portable and compact photolithography system based on a solid-state light source of UV light-emitting diodes (LEDs) is described. Solid-state photolithography can achieve high-quality patterns over a wide range of length scales at a fraction of the cost of contact mask aligners. 2D nanoscale and 1D microscale patterns can easily be created.