Advanced Applications of Elliptical Vibration Cutting in Micro/Nanomachining of Difficult-to-Cut Materials
Advanced Applications of Elliptical Vibration Cutting in Micro/Nanomachining of Difficult-to-Cut Materials
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DOI：
10.1007/978-981-13-3335-4_7
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发表时间：
2018-12
期刊：
影响因子：
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通讯作者：
Jianguo Zhang;N. Suzuki;E. Shamoto
中科院分区：
文献类型：
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作者：
Jianguo Zhang;N. Suzuki;E. Shamoto
具有复杂微/纳米结构的纹理表面可以提供先进和有用的功能。为了促进这些纹理表面的大规模生产和广泛应用，超精密淬火钢和碳化钨模具的结构表面制造技术变得必不可少。目前，椭圆振动切削以其优异的加工性能在难切削材料的精密加工中受到越来越多的关注。本章的重点是EVC在微纳米制造工艺中的实际应用。首先介绍了EVC技术的发展，然后详细探讨了EVC技术在微纳米加工中的优势。此外，还介绍了一种独特的幅度控制雕刻方法，通过控制振动幅度来任意改变切割深度。阐明了如何应用EVC获得碳化钨韧性加工的准则。实验验证了高精度微纳加工碳化钨和淬硬钢的可行性，在切削深度方向的加工精度约为±1 nm。成功地在碳化钨、淬火钢和单晶硅上制备了一系列具有纹理凹槽、韧窝图案和正弦网格的功能表面，这些表面可以应用于成型、编码器、光电子和半导体行业。EVC技术有望在实际工业应用中促进微纳米加工工艺的发展。
Textured surfaces with sophisticated micro/nanostructures can provide advanced and useful functions. To promote widespread use of these textured surfaces with mass production, manufacturing technology of structured surfaces for ultra-precision dies and molds made of hardened steel and tungsten carbide becomes essential. Nowadays, elliptical vibration cutting (EVC) is attracting more and more attention due to its excellent machining performances in precision machining of difficult-to-cut materials. The emphasis on this chapter is the practical applications of EVC in micro/nanomanufacture process. The development of the EVC technology is introduced firstly, and then, the advantageousness of EVC in the micro/nanomachining process is explored in detail. Moreover, a unique amplitude control sculpturing method, where the depth of cut is arbitrary changed by controlling the vibration amplitude, is introduced. As following, a criterion to indicate how to obtain ductile machining of tungsten carbide is clarified by applying EVC. The feasibility of highly accurate micro/nanomachining of tungsten carbide and hardened steel is experimentally verified with a machining accuracy of about ±1 nm in the depth-of-cut direction. A series of functional surfaces with textured grooves, dimple patterns, and sinusoidal grids were successfully fabricated on tungsten carbide, hardened steel, and single-crystal silicon, which could be applied to the molding, encoder, optoelectronics, and semiconductor industries. The EVC technology is expected to promote the development of micro/nanomachining process in the actual industrial applications.