High-throughput rear-surface drilling of microchannels in glass based on electron dynamics control using femtosecond pulse trains
High-throughput rear-surface drilling of microchannels in glass based on electron dynamics control using femtosecond pulse trains
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DOI：
10.1364/ol.37.002781
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发表时间：
2012-07-15
期刊：
影响因子：
3.6
通讯作者：
Lu, Yongfeng
中科院分区：
文献类型：
--
作者：
Jiang, Lan;Liu, Pengjun;Lu, Yongfeng
这项研究提出了一种后表面烧蚀增强方法，通过对飞秒激光脉冲序列进行时间整形来制造高纵横比微通道。在 K9 玻璃的案例研究中，与相同加工参数下的传统飞秒激光钻孔相比，该方法的材料去除率提高了 56 倍，最大钻孔深度提高了 3 倍。这些改进是由于通过整形飞秒脉冲序列改变了光子-电子相互作用，可以通过改变自由电子密度等电子动力学来有效地调节光子吸收和局域瞬态材料特性。 (c) 2012 年美国光学学会
This study proposes a rear-surface ablation enhancement approach to fabricate high-aspect-ratio microchannels by temporally shaping femtosecond laser pulse trains. In the case study of K9 glass, enhancements of up to a 56 times higher material removal rate and a three times greater maximum drilling depth are obtained by the proposed method, as compared with conventional femtosecond laser drilling at the same processing parameters. The improvements are due to the changes of photon-electron interactions by shaping femtosecond pulse train, which can effectively adjust the photon absorption and localized transient material properties by changing electron dynamics such as free electron densities. (c) 2012 Optical Society of America