EXCITED STATE DENSITY DISTRIBUTIONS OF H, C, C2, AND CH BY SPATIALLY RESOLVED OPTICAL EMISSION IN A DIAMOND DEPOSITING DC-ARCJET REACTOR
EXCITED STATE DENSITY DISTRIBUTIONS OF H, C, C2, AND CH BY SPATIALLY RESOLVED OPTICAL EMISSION IN A DIAMOND DEPOSITING DC-ARCJET REACTOR
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DOI：
10.1116/1.581037
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发表时间：
1998-10
期刊：
影响因子：
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通讯作者：
J. Luque;W. Juchmann;E. Brinkman;J. Jeffries
中科院分区：
文献类型：
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作者：
J. Luque;W. Juchmann;E. Brinkman;J. Jeffries
利用空间分辨发射光谱技术研究了直流电弧喷射金刚石沉积反应器中的激发态。温度测量表明，冷等离子体与电子，激发态，和气体在非热平衡。的H，C，C2，和CH激发态数密度随距离喷嘴呈指数下降，并有一个显着的增加，在衬底上方的激波结构。H发射在整个边界层中增加到衬底表面，而来自其他物种的发射在边界层中具有最大值，然后再次朝向衬底减小。重建的激发态浓度的径向分布是高斯分布，与C和C2的分布比H和CH的宽。光学发射校准与瑞利散射或激光诱导荧光提供绝对数密度。我们发现所有的激发物种是目前的浓度两个或两个以上的数量级小于…
Spatially resolved optical emission spectroscopy is used to investigate excited species in a dc-arcjet diamond depositing reactor. Temperature measurements indicate a cold plasma with electrons, excited states, and gas in nonthermal equilibrium. The H, C, C2, and CH excited state number densities decrease exponentially with the distance from the nozzle and have a pronounced increase in the shock structure above the substrate. The H emission increases throughout the boundary layer to the substrate surface, whereas emission from other species has a maximum in the boundary layer and then decreases again towards the substrate. The reconstructed radial distribution of excited state concentrations are Gaussian, with the C and C2 distributions broader than the H and CH ones. The optical emission is calibrated with either Rayleigh scattering or laser-induced fluorescence to furnish absolute number densities. We find all the excited species to be present in concentrations two or more orders of magnitude smaller th...