Nanoscale displacement measurement of electrostatically actuated micro-devices using optical microscopy and digital image correlation
Nanoscale displacement measurement of electrostatically actuated micro-devices using optical microscopy and digital image correlation
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DOI：
10.1016/j.sna.2010.05.014
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发表时间：
2010-07
影响因子：
4.6
通讯作者：
A. Ya’akobovitz;S. Krylov;Y. Hanein
中科院分区：
文献类型：
--
作者：
A. Ya’akobovitz;S. Krylov;Y. Hanein
在微纳机电系统领域取得的最新进展需要一种可靠的方法来高分辨率地表征静电驱动的器件。本文提出了一种基于数字图像相关(DIC)算法的纳米级位移光学检测的研究，该算法通常用于表征面内位移。采用改进的漂移校正DIC(DC-DIC)算法对静电驱动的微电子机械系统(MEMS)器件的光学图像进行了处理，并对处理结果进行了分析。使用DC-DIC，分辨率显著提高，并使用标准光学和处理工具捕获了纳米级精度的位移测量。本研究为微器件刚体纳米级位移的光学表征提供了一种简单可靠的方法。
Recent progress achieved in the fields of micro and nanoelectromechanical systems demands a reliable method for high resolution characterization of electrostatically actuated devices. This paper presents a study on optical detection of nanoscale displacements using digital image correlation (DIC) algorithms, commonly used in characterization of in-plane displacements. Optical images of an electrostatically actuated micro electromechanical systems (MEMS) device were processed using a modified drift corrected DIC (DC-DIC) algorithm and the results were analyzed. Using the DC-DIC, the resolution was enhanced significantly and displacement measurements with nanoscale accuracy were captured using standard optics and processing tools. The present study provides a simple and reliable technique for optical characterization of rigid body nanoscale displacements of micro devices.