Mechanism of incongruent ablation of SrTiO3
Mechanism of incongruent ablation of SrTiO3
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DOI：
10.1063/1.367106
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发表时间：
1998-03-15
影响因子：
3.2
通讯作者：
De Groot, DG
中科院分区：
文献类型：
--
作者：
Dam, B;Rector, JH;De Groot, DG
在低能量密度下，激光沉积SrTiO_3薄膜的[Sr]/[Ti]比值是激光能量密度的函数。与化学计量的偏差在时间上是显著恒定的。从分析的薄膜和被照射的目标的组成，我们推导出一个体积扩散辅助的优先烧蚀过程。在高能量密度下（1.3J/cm ~ 2以上），得到了化学计量比的SrTiO_3薄膜。这不是由于烧蚀机制的变化，而是由于在1.3 J/cm（2）下，Sr在被照射靶内的计算扩散长度变为每次发射的烧蚀速率的量级。(C)1998年美国物理学会。
At low fluences, the [Sr]/[Ti] ratio of laser deposited SrTiO3 films appears to be a function of the laser fluence. The deviation from stoichiometry is remarkably constant in time. From an analysis of both the composition of the film and the irradiated target, we deduce a volume-diffusion-assisted preferential ablation process. At high fluences (above 1.3 J/cm(2)), stoichiometric SrTiO3 films are obtained. This is not due to a change in ablation mechanism, but follows from the fact that at 1.3 J/cm(2) the calculated diffusion length of Sr within the irradiated target, becomes of the order of the ablation rate per shot. (C) 1998 American Institute of Physics.