W.Nakao, H.Fukuyama, K.Nagata: "AlN Firms Epitaxialy Formed by Direct Nitridation of Sapphire using Aluminum Oxynitride as a Buffer Layer"Proceedings Vol.of the Wide Bandgap Semiconductors for Photonic and Electronic Devices and Sensors symposium. 76-82 (

W.Nakao, H.Fukuyama, K.Nagata: "AlN Firms Epitaxialy Formed by Direct Nitridation of Sapphire using Aluminum Oxynitride as a Buffer Layer"Proceedings Vol.of the Wide Bandgap Semiconductors for Photonic and Electronic Devices and Sensors symposium. 76-82 (
复制标题

W.Nakao、H.Fukuyama、K.Nagata:“使用氧氮化铝作为缓冲层通过蓝宝石直接氮化形成 AlN 薄膜”,光子电子器件和传感器宽带隙半导体研讨会论文集。

DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
--
中科院分区:
--
文献类型:
--
作者:

文献摘要

相似文献