The influence of germanium codoping on the reduction of interstitial oxygen concentration in boron-doped Czochralski-silicon : a novel approach to suppress light induced degradation
The influence of germanium codoping on the reduction of interstitial oxygen concentration in boron-doped Czochralski-silicon : a novel approach to suppress light induced degradation
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共掺杂锗对硼掺杂直拉硅中间隙氧浓度降低的影响：抑制光致退化的新方法
DOI：
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发表时间：
2011
期刊：
影响因子：
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通讯作者：
S.UDA
中科院分区：
文献类型：
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作者：
M.ARIVANANDHAN;R.GOTOH;T.WATAHIKI;K.FUJIWARA;Y.HAYAKAWA;M.KONAGAI;S.UDA
