An ultrasonic levitation journal bearing able to control spindle center position
An ultrasonic levitation journal bearing able to control spindle center position
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DOI：
10.1016/j.ymssp.2012.05.006
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发表时间：
2013-03
影响因子：
8.4
通讯作者：
Su Zhao;S. Mojrzisch;J. Wallaschek
中科院分区：
文献类型：
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作者：
Su Zhao;S. Mojrzisch;J. Wallaschek
提出了一种基于挤压油膜悬浮的新型主动非接触径向轴承。两个品质区分所提出的设计从以前的：显着提高负载能力和精确的主轴位置控制的能力。研究了挤压油膜超声悬浮承载力的理论计算模型，并通过实验进行了验证。利用机电等效电路模型研究了超声换能器的动态特性。由每个换能器产生的悬浮力由具有自谐振（自激）频率控制的状态反馈控制器单独控制。实现了主轴中心位置的主动控制，主轴中心定位精度在100nm范围内。与以前报道的方法相比，所提出的轴承实现的负载能力显着提高。
A novel active non-contact journal bearing based on squeeze film levitation is presented. Two qualities distinguish the proposed design from the previous ones: significantly improved load capacity and the ability of precision spindle position control. Theoretical models to calculate load carrying forces induced by squeeze film ultrasonic levitation are studied and validated by experimental results. Dynamic behavior of the ultrasonic transducer is investigated using electro-mechanical equivalent circuit model. Levitation forces generated by each transducer are individually controlled by a state feedback controller with auto-resonant (self-excited) frequency control. Active control of the spindle center position is achieved with positioning accuracy of the spindle center in the range of 100nm. The load capacity achieved by the proposed bearing is dramatically improved compared to previously reported approaches.