Design and Manufacture of An Integrated Micro Flow Sensor with SU-8 Channel
Design and Manufacture of An Integrated Micro Flow Sensor with SU-8 Channel
复制标题
SU-8通道集成微流量传感器的设计与制造
DOI：
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发表时间：
2010
影响因子：
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通讯作者：
Chen D.
中科院分区：
文献类型：
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作者：
Lu Q.;Chen X.;Xiao L.-J.;Chen D.
以SU-8为流道，内部集成电极，并通过SU-8与PDMS的键合封装，制作出集成在流道内的微型流量传感器（聚二甲基硅氧烷）。根据量热理论，多物理场模拟和分析软件comsol，建立了热式微流量传感器的模型，分析了影响其灵敏度的关键因素，设计了一种微流量传感器，最后，对微流量传感器进行了流量-电压测试。
A micro flow sensor integrated inside the flow channel was manufactured by using SU-8 as the flow channel which integrated electrodes inside and packaged through the bonding between SU-8 and PDMS(polydimethylsiloxane).According to the calorimetric theory,comsol,a multi-physics simulation and analysis software, was implemented to build the model of thermal micro flow sensor to analyze the key factors' influences on its sensitivity.Then a micro flow sensor was designed and manufactured with MEMS technology.Finally,the flow-voltage testing of the micro flow sensor was executed.