Skin electronics from scalable fabrication of an intrinsically stretchable transistor array
Skin electronics from scalable fabrication of an intrinsically stretchable transistor array
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DOI：
10.1038/nature25494
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发表时间：
2018-03-01
期刊：
影响因子：
64.8
通讯作者：
Bao, Zhenan
中科院分区：
文献类型：
--
作者：
Wang, Sihong;Xu, Jie;Bao, Zhenan
可以无缝粘附到人体皮肤或身体内的皮肤状电子产品非常适合健康监测（1，2），医疗（3，4），医疗植入物（5）和生物学研究（6，7）等应用，以及包括人机界面，软机器人和增强现实（8，9）的技术。使这种电子产品柔软和可拉伸就像人类皮肤一样，将使它们佩戴起来更舒适，并且通过增加接触面积，将大大提高从皮肤获取的信号的保真度。刚性无机和有机器件的结构工程已经实现了电路级的可拉伸性，但这需要复杂的制造技术，并且通常会降低阵列内器件的密度（2，10 -12）。我们推断，所需的参数，如更高的机械变形性和鲁棒性，改善的皮肤相容性和更高的设备密度，可以通过使用固有的可拉伸聚合物材料代替。然而，本质上可拉伸的材料和器件的生产在很大程度上仍处于起步阶段（13-15）：已经报道了这样的材料（11，16 -19），但是由于缺乏可扩展的制造技术，功能性的本质上可拉伸的电子器件尚未被证明。在这里，我们描述了一种制造工艺，该工艺能够从各种本质上可拉伸的电子聚合物获得高产率和均匀性。我们展示了一个固有的可拉伸聚合物晶体管阵列，具有前所未有的器件密度为每平方厘米347个晶体管。这种晶体管的平均电荷载流子迁移率与非晶硅相当，在100%应变下循环1,000次时变化很小（在一个数量级内），没有电流-电压滞后。因此，我们的晶体管阵列构成了本质上可拉伸的皮肤电子器件，并包括用于传感阵列的有源矩阵以及模拟和数字电路元件。我们的工艺提供了一个通用平台，用于整合其他内在可拉伸的聚合物材料，从而能够制造下一代可拉伸皮肤电子设备。
Skin-like electronics that can adhere seamlessly to human skin or within the body are highly desirable for applications such as health monitoring(1,2), medical treatment(3,4), medical implants(5) and biological studies(6,7), and for technologies that include human-machine interfaces, soft robotics and augmented reality(8,9). Rendering such electronics soft and stretchable-like human skin-would make them more comfortable to wear, and, through increased contact area, would greatly enhance the fidelity of signals acquired from the skin. Structural engineering of rigid inorganic and organic devices has enabled circuit-level stretchability, but this requires sophisticated fabrication techniques and usually suffers from reduced densities of devices within an array(2,10-12). We reasoned that the desired parameters, such as higher mechanical deformability and robustness, improved skin compatibility and higher device density, could be provided by using intrinsically stretchable polymer materials instead. However, the production of intrinsically stretchable materials and devices is still largely in its infancy(13-15): such materials have been reported(11,16-19), but functional, intrinsically stretchable electronics have yet to be demonstrated owing to the lack of a scalable fabrication technology. Here we describe a fabrication process that enables high yield and uniformity from a variety of intrinsically stretchable electronic polymers. We demonstrate an intrinsically stretchable polymer transistor array with an unprecedented device density of 347 transistors per square centimetre. The transistors have an average charge-carrier mobility comparable to that of amorphous silicon, varying only slightly (within one order of magnitude) when subjected to 100 per cent strain for 1,000 cycles, without current-voltage hysteresis. Our transistor arrays thus constitute intrinsically stretchable skin electronics, and include an active matrix for sensory arrays, as well as analogue and digital circuit elements. Our process offers a general platform for incorporating other intrinsically stretchable polymer materials, enabling the fabrication of next-generation stretchable skin electronic devices.