Analysis and design of a novel piezoresistive accelerometer with axially stressed self-supporting sensing beams
Analysis and design of a novel piezoresistive accelerometer with axially stressed self-supporting sensing beams
复制标题
一种新型轴向受力自支撑传感梁压阻式加速度计的分析与设计
DOI：
10.1016/j.sna.2016.04.053
复制
发表时间：
2016-08-15
影响因子：
4.6
通讯作者：
Zhao, Yulong
中科院分区：
文献类型：
--
作者：
Xu, Yu;Zhao, Libo;Zhao, Yulong
研制了一种具有高灵敏度、高谐振频率和高跨轴灵敏度的压阻式加速度计。本研究设计、制作并测试了具有轴向应力自支撑传感梁的加速度计芯片。推导了感应梁的位置、应力和谐振频率的表达式，并通过有限元模拟对结果进行了验证。通过静态和动态实验对所制加速度计进行了表征。结果表明，测量灵敏度为0.666 mV/g/3 V，谐振频率为17.1 kHz。同时，为低交叉轴灵敏度加速度计的设计提供了一种可行的方法。与已有的加速度计相比，所研制的加速度计在综合优值（FOM）方面具有优异的性能。结果表明，该结构对提高加速度计性能是可行的。(C) 2016 Elsevier B.V.版权所有
A novel piezoresistive accelerometer was developed with high performance in sensitivity, resonant frequency and cross-axis sensitivity. The accelerometer chip with axially stressed self-supporting sensing beams has been designed, fabricated and tested in our study. We derived the expressions for the location of the sensing beams, stresses and resonant frequency, and then these results were verified by the finite element method (FEM) simulation. The fabricated accelerometer was characterized by the static and dynamic experiments. The results showed that the measuring sensitivity was 0.666 mV/g/3 V and the resonant frequency was 17.1 kHz. Meanwhile, the proposed accelerometer provided an available method for the low cross-axis sensitivity design. Compared with other accelerometers in the literatures, the developed accelerometer exhibited an excellent performance concerning a comprehensive figure of merit (FOM). The results demonstrated the feasibility of the novel structure to improve the accelerometer's performance. (C) 2016 Elsevier B.V. All rights reserved.