Nonequilibrium atmospheric pressure plasma with ultrahigh electron density and high performance for glass surface cleaning
Nonequilibrium atmospheric pressure plasma with ultrahigh electron density and high performance for glass surface cleaning
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DOI：
10.1063/1.2885084
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发表时间：
2008-02-25
影响因子：
4
通讯作者：
Hori, Masaru
中科院分区：
文献类型：
--
作者：
Iwasaki, Masahiro;Inui, Hirotoshi;Hori, Masaru
我们在两个电极之间施加交流电流，产生了一个非平衡大气压等离子体。气体温度和电子密度进行了评估，使用光学发射光谱。发现等离子体的气体温度为1800 ~ 2150 K，电子密度为10（16）cm（-3）量级。在15 slm（标准升/分钟）的1%O-2/Ar气体流速下获得了1.6 × 10（15）cm（-3）的非常高的氧自由基浓度。在等离子体暴露时间为23 ms的玻璃清洁过程中获得低于10度的接触角（C）2008美国物理研究所。
We produced a nonequilibrium atmospheric pressure plasma by applying an alternative current between two electrodes. The gas temperature and electron density were evaluated using optical emission spectroscopy. It was found that the plasma had gas temperatures from 1800 to 2150 K and ultrahigh electron densities in the order of 10(16) cm(-3). A remarkably high oxygen radical concentration of 1.6 x 10(15) cm(-3) was obtained at a 1% O-2/Ar gas flow rate of 15 slm (standard liters per minute). Contact angles below 10 degrees were obtained in the process of glass cleaning with a plasma exposure time of 23 ms. (C) 2008 American Institute of Physics.