EBSD Sample Preparation: High Energy Ar Ion Milling
EBSD Sample Preparation: High Energy Ar Ion Milling
复制标题
EBSD 样品制备：高能 Ar 离子铣削
DOI：
--
复制
发表时间：
2015
期刊：
影响因子：
--
通讯作者：
K. Havancsák
中科院分区：
文献类型：
--
作者：
Z. Dankházi;Szilvia Kalácska;A. Baris;G. Varga;Z. Radí;K. Havancsák
利用一种新型的Ar离子研磨装置研究了一系列金属样品的表面质量变化。用电子背散射衍射(EBSD)测量的图像质量(IQ)参数表征了样品的表面质量。已经提供了Ar离子抛光配方来准备适合于高质量EBSD测绘的表面。样品的初始表面经过粗略研磨和抛光。在后续的Ar离子抛光处理过程中，可以获得高质量的表面光洁度。确定了几种材料的最佳Ar离子入射角和抛光次数。
Surface quality development on series of metal samples was investigated using a new Ar ion milling apparatus. The surface quality of samples was characterized by the image quality (IQ) parameter of the electron backscatter diffraction (EBSD) measurement. Ar ion polishing recipes have provided to prepare a surface appropriate for high quality EBSD mapping. The initial surfaces of samples were roughly grinded and polished. High quality surface smoothness could be achieved during the subsequent Ar ion polishing treatment. The optimal angles of Ar ion incidence and the polishing times were determined for several materials.