Polycrystal orientation maps from TEM

Polycrystal orientation maps from TEM
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DOI:
10.1016/s0304-3991(02)00435-7
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发表时间:
2003-08-01
期刊:
影响因子:
2.2
通讯作者:
Lecomte, JS
Lecomte, JS
中科院分区:
工程技术3区
文献类型:
--
作者:
Fundenberger, JJ;Morawiec, A;Lecomte, JS

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晶体取向形貌的测定是研究多晶材料的一项重要技术。本文介绍了一个利用透射电子显微镜(TEM)菊池图和会聚束电子衍射图生成取向图的系统。使用配备CCD相机的计算机控制的TEM上的步进光束扫描获得的方向图。在每个步骤中,获取的衍射图案被索引并确定取向。虽然,所使用的方法是类似的SEM/电子背散射衍射(EBSD)取向成像设置中应用的,TEM为基础的系统显着不同于其SEM对应。主要的差异是由于TEM和SEM衍射图案的具体特征。此外,生成的贴图也不等价。在透射电镜产生的样品上,取向测定的精度可优于0.1 °。空间分辨率估计约为10 nm。后者的功能使得TEM取向映射系统的重要工具,在细尺度的研究无法达到SEM/EBSD系统。自动定向标测有望成为常规TEM衬度图像的有益补充。这一新技术对于精细结构材料的表征将是必不可少的。为了说明这一点,包括通过严重塑性变形产生的铝样品的示例图。(C)2003 Elsevier Science B. V.保留所有权利。
Determination of topography of crystallite orientations is an important technique of investigation of polycrystalline materials. A system for creating orientation maps using transmission electron microscope (TEM) Kikuchi patterns and Convergent beam electron diffraction patterns is presented. The orientation maps are obtained using a step-by-step beam scan on a computer-controlled TEM equipped with a CCD camera. At each step, acquired diffraction patterns are indexed and orientations are determined. Although, the approach used is similar to that applied in SEM/electron back scattered diffraction (EBSD) orientation imaging setups, the TEM-based system considerably differs from its SEM counterpart. The main differences appear due to specific features of TEM and SEM diffraction patterns. Also, the resulting maps are not equivalent. On these generated by TEM, the accuracy of orientation determination can be better than 0.1degrees. The spatial resolution is estimated to be about 10 nm. The latter feature makes the TEM orientation mapping system an important tool for studies at fine scale unreachable by SEM/EBSD systems. The automatic orientation mapping is expected to be a useful complement of the conventional TEM contrast images. The new technique will be essential for characterization of fine structure materials. To illustrate that, example maps of an aluminum sample produced by severe plastic deformation are included. (C) 2003 Elsevier Science B.V. All rights reserved.