Thermophysical properties of SnO_2-based transparent conductive films: Effect of dopant species and structure compared with In_2O_3-, ZnO-, and TiO_2-based films
Thermophysical properties of SnO_2-based transparent conductive films: Effect of dopant species and structure compared with In_2O_3-, ZnO-, and TiO_2-based films
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SnO_2基透明导电薄膜的热物理性质:与In_2O_3、ZnO和TiO_2基薄膜相比,掺杂剂种类和结构的影响
DOI:
10.1557/jmr.2014.191
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发表时间:
2014
影响因子:
2.7
通讯作者:
Y. Shigesato
中科院分区:
文献类型:
--
作者:
Nobuto Oka;S. Yamada;T. Yagi;N. Taketoshi;J. Jia;Y. Shigesato
We investigate the effect of dopant species and structure on the thermal conductivity of Sb-doped SnO_2 (ATO) and Ta-doped SnO_2 (TTO) films and compare the results with those of In_2O_3-, ZnO-, and TiO_2-based transparent conductive films. The thermal conductivities (λ) of polycrystalline ATO and TTO films are 4.4–4.9 and 4.7 W m^−1 K^−1, respectively. The thermal conductivities via phonons (λ_ph) are almost identical for both dopant species (Sb and Ta): 4.3 and 4.5 W m^−1 K^−1 for Sb and Ta, respectively, on average. These results for λ_ph are larger than that for Sn-doped In_2O_3 films (3.8 W m^−1 K^−1) and considerably larger than that for amorphous ATO films (1.0 W m^−1 K^−1). These facts lead us to conclude that the base-material species (SnO_2 or In_2O_3) and structure (polycrystalline or amorphous) affect the thermophysical properties of ATO and TTO much more than the dopant species.
DOI:
--
发表时间:
2008
期刊:
Jpn. J Appl. Phys. 47
影响因子:
--
作者:
T.Seki;M.Onaka;T. Sugiyama
通讯作者:
T. Sugiyama