Nano silica diaphragm in-fiber cavity for gas pressure measurement.
Nano silica diaphragm in-fiber cavity for gas pressure measurement.
复制标题
用于气体压力测量的纳米二氧化硅隔膜光纤腔
DOI：
10.1038/s41598-017-00931-0
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发表时间：
2017-04-11
影响因子：
4.6
通讯作者：
Zhang F
中科院分区：
文献类型：
--
作者：
Liu S;Wang Y;Liao C;Wang Y;He J;Fu C;Yang K;Bai Z;Zhang F
我们展示了一个超高灵敏度的气体压力传感器的基础上的法布里-珀罗干涉仪采用光纤尖端的密封腔。该腔由石英毛细管和厚度为170 nm的石英膜片组成，代表了迄今为止通过电弧放电技术制造的最薄的石英膜片。所得到的基于法布里-珀罗干涉仪的气体压力传感器展示了约12.22 nm/kPa的气体压力灵敏度，这比类似配置的光纤尖端气泡传感器的气体压力灵敏度大两个数量级以上。此外，我们的气体压力传感器具有约106 Pa/°C的低温度交叉灵敏度，并且传感器在高达约1000 °C的温度下工作良好。因此，传感器可以潜在地用于高温环境中。
We demonstrate an ultrahigh-sensitivity gas pressure sensor based on the Fabry-Perot interferometer employing a fiber-tip diaphragm-sealed cavity. The cavity is comprised of a silica capillary and ultrathin silica diaphragm with a thickness of 170 nm, with represents the thinnest silica diaphragm fabricated thus far by an electrical arc discharge technique. The resulting Fabry-Perot interferometer-based gas pressure sensor demonstrates a gas pressure sensitivity of about 12.22 nm/kPa, which is more than two orders of magnitude greater than that of a similarly configured fiber-tip air bubble sensor. Moreover, our gas pressure sensor has a low temperature cross-sensitivity of about 106 Pa/°C, and the sensor functions well up to a temperature of about 1000 °C. As such, the sensor can potentially be employed in high-temperature environments.