Charged Particle-Induced Surface Reactions of Organometallic Complexes as a Guide to Precursor Design for Electron- and Ion-Induced Deposition of Nanostructures
Charged Particle-Induced Surface Reactions of Organometallic Complexes as a Guide to Precursor Design for Electron- and Ion-Induced Deposition of Nanostructures
复制标题
带电粒子诱导的有机金属配合物表面反应作为电子和离子诱导纳米结构沉积前驱体设计的指南
DOI：
10.1021/acsami.1c12327
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发表时间：
2021
影响因子：
9.5
通讯作者：
McElwee-White, Lisa
中科院分区：
文献类型：
--
作者：
Yu, Jo-Chi;Abdel-Rahman, Mohammed K.;Fairbrother, D. Howard;McElwee-White, Lisa
聚焦电子束诱导沉积（FEBID）和聚焦离子束诱导沉积（FIBID）是直接写入制造技术，其使用带电粒子（电子或离子）的聚焦束通过在低压环境中将有机金属前体分解到衬底上来创建3D含金属纳米结构。对于许多应用，重要的是最大限度地减少这些纳米结构的杂质从不完全的配体解离和解吸。这聚光灯的应用介绍了超高真空表面科学研究的使用，以获得在有机金属前体候选人的电子和离子诱导过程的机械信息。结果用于FEBID和FIBID的定制前体的基于机制的设计。
Focused electron beam-induced deposition (FEBID) and focused ion beam-induced deposition (FIBID) are direct-write fabrication techniques that use focused beams of charged particles (electrons or ions) to create 3D metal-containing nanostructures by decomposing organometallic precursors onto substrates in a low-pressure environment. For many applications, it is important to minimize contamination of these nanostructures by impurities from incomplete ligand dissociation and desorption. This spotlight on applications describes the use of ultra high vacuum surface science studies to obtain mechanistic information on electron- and ion-induced processes in organometallic precursor candidates. The results are used for the mechanism-based design of custom precursors for FEBID and FIBID.