Resonator combined with a piezoelectric actuator for chemical analysis by force microscopy.
Resonator combined with a piezoelectric actuator for chemical analysis by force microscopy.
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DOI：
10.1063/1.2748394
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发表时间：
2007-06
期刊：
影响因子：
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通讯作者：
Y. Kawai;T. Ono;M. Esashi;E. Meyer;C. Gerber
中科院分区：
文献类型：
--
作者：
Y. Kawai;T. Ono;M. Esashi;E. Meyer;C. Gerber
动态扫描力显微镜的高频硅谐振器与集成的压电致动元件相结合，用于大位移。在纳米尺度上成像需要高的共振频率，并且在探针末端对材料进行化学分析需要大的位移。小的压电谐振器形成在一个长的压电致动器使用硅微加工技术的端部。谐振器可以在96.4 kHz下振荡，并且致动器在探针末端产生15 microm的最大位移。动态模式扫描力显微镜的能力，使用集成的压电谐振器，证明了2微米间距Au光栅。
A high frequency silicon resonator for dynamic scanning force microscopy is combined with an integrated piezoelectric actuation element for large displacements. A high resonance frequency is required for imaging on the nanometer scale, and a large displacement is needed for the chemical analysis of the material at the end of the probe. The small piezoelectric resonator is formed at the end of a long piezoelectric actuator using a silicon micromachining technology. The resonator can be oscillated at 96.4 kHz, and the actuator generates a maximum displacement of 15 microm at the end of the probe. The dynamic-mode scanning force microscopy capability, using the integrated piezoelectric resonator, is demonstrated on a 2 microm pitch Au grating.