Handbook of Surface and Nanometrology
Handbook of Surface and Nanometrology
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DOI：
10.1887/0750305835
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发表时间：
2002-12
期刊：
影响因子：
--
通讯作者：
D. Whitehouse
中科院分区：
文献类型：
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作者：
D. Whitehouse
介绍-表面和纳米计量学一般表面计量学背景表面计量学纳米计量学书籍结构表征表面的性质表面几何形状评估和参数表征波纹度形状误差结构化和自由形式表面的表征表面缺陷的表征讨论处理，操作，离散方法（数字）随机表面的性质统计分析参数的数字形式表面计量基准的数字估计算法和数学技术线性规划傅立叶变换和快速傅立叶变换的基本概念表面计量空间频率函数表面生成原子的考虑和模拟概述测量技术背景测量系统Stylus微测量仪器Stylus纳米/原子尺度光学技术电容和其他技术电子显微镜，光子显微镜，拉曼光谱技术的比较-概述一些设计考虑标准化-溯源性-不确定度介绍误差的性质基本误差理论误差传播仪器中表面计量不确定度的统计检验-一般校正触针和其他仪器的校正表格仪器的校正表面参数的变化GPS系统-国际和国家标准CAD和图纸规范概要表面和制造介绍制造工艺切削研磨工艺非常规工艺成型工艺尺寸对制造的影响：宏观到纳米到原子的过程结构化表面制造自由曲面的制造金属的数学处理-有限元分析（Fe），Md，Nurbs子曲面和界面曲面完整性曲面几何-表面光洁度在微电子元件制造中的作用讨论和结论表面几何形状及其在微电子元件制造中的重要性功能介绍两体相互作用-静态情况宏观到纳米尺度，接触，粘附腐蚀两体相互作用-动态行为宏观到纳米尺度，摩擦，磨损，润滑一体相互作用-光学散射，衍射系统功能多表面组装讨论结论表面几何，尺寸效应的尺度，纳米计量学介绍尺寸尺度对表面几何的影响尺寸尺度，表面几何，制造中尺寸和表面的功能尺度纳米仪器操作和设计考虑标准，可追溯性和不确定性在典型纳米特征的纳米尺度测量中用干涉仪和其他设备测量纳米尺度的长度宏观情况下的纳米几何形状讨论和结论一般评论介绍表征处理，操作，和模拟测量技术可追溯性标准化不确定性表面和制造表面几何形状和性能纳米测量概述词汇索引参考出现在每章的末尾。
Introduction-Surface and Nanometrology General Surface Metrology Background to Surface Metrology Nanometrology Book Structure Characterization The Nature of Surfaces Surface Geometry Assessment and Parameters Characterization Waviness Errors of Form Characterization of Structured and Free Form Surfaces Characterization of Defects on the Surface Discussion Processing, Operations, and Simulations Digital Methods Discrete (Digital) Properties of Random Surfaces Digital Form of Statistical Analysis Parameters Digital Estimation of References for Surface Metrology Algorithms and Mathematical Techniques Basic Concepts in Linear Programming Fourier Transforms and the Fast Fourier Transform Transformations in Surface Metrology Space-Frequency Functions Surface Generation Atomistic Considerations and Simulations Summary Measurement Techniques Background Measurement Systems Stylus-Micro Measuring Instruments Stylus-Nano/Atomic Scale Optical Techniques Capacitance and Other Techniques Electron Microscopy, Photon Microscopy, Raman Spectrometry Comparison of Techniques-General Summary Some Design Considerations Standardization-Traceability-Uncertainty Introduction Nature of Errors Basic Error Theory Propagation of Errors Statistical Tests for Surface Metrology Uncertainty in Instruments-Calibration in General The Calibration of Stylus and Other Instruments Calibration of Form Instruments Variability of Surface Parameters Gps System-International and National Standards Specification for CAD and on Drawings Summary Surfaces and Manufacture Introduction Manufacturing Processes Cutting Abrasive Processes Unconventional Processes Forming Processes Effect of Scale of Size in Manufacture: Macro to Nano to Atomic Processes Structured Surface Manufacture Manufacture of Free-Form Surfaces Mathematical Processing of Manufacture-Finite Element Analysis (Fe), Md, Nurbs The Subsurface and the Interface Surface Integrity Surface Geometry-A Fingerprint of Manufacture Surface Finish Effects in Manufacture of Microchip Electronic Components Discussion and Conclusions Surface Geometry and Its Importance in Function Introduction Two-Body Interaction-The Static Situation Macro to Nanoscale, Contact, Adhesion Corrosion Two-Body Interactions-Dynamic Behavior Macro to Nanoscale, Friction, Wear, Lubrication One-Body Interactions- Optical Scatter, Diffraction System Function Multi-Surfaces Assembly Discussion Conclusions Surface Geometry, Scale of Size Effects, Nanometrology Introduction Effect of Scale of Size on Surface Geometry Scale of Size, Surface Geometry, and Function Scale of Size and Surfaces in Manufacture Nano Instrumentation Operation and Design Considerations Standards, Traceability, and Uncertainty at the Nanoscale Measurement of Typical Nanofeatures Measuring Length to Nanoscale with Interferometers and Other Devices Nano Geometry in Macro Situations Discussion and Conclusions General Comments Introduction Characterization Processing, Operations, and Simulations Measurement Techniques Traceability Standardization Uncertainty Surfaces and Manufacture Surface Geometry and Performance Nanometrology Overview Glossary Index References appear at the end of each chapter.