Microstructure and property evolution of Cr-DLC films with different Cr content deposited by a hybrid beam technique
Microstructure and property evolution of Cr-DLC films with different Cr content deposited by a hybrid beam technique
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混合束沉积不同Cr含量Cr-DLC薄膜的微观结构和性能演化
DOI：
10.1016/j.vacuum.2010.11.013
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发表时间：
2011-02-01
期刊：
影响因子：
4
通讯作者：
Wang, Aiying
中科院分区：
文献类型：
--
作者：
Dai, Wei;Ke, Peiling;Wang, Aiying
采用直流磁控溅射和线性离子源组成的混合束系统在硅片上沉积了含铬类金刚石薄膜。通过改变Ar和CH 4气体混合物中Ar的分数来调节膜中的铬含量。利用XPS、TEM、AFM、SEM、纳米压痕仪和摩擦磨损试验机研究了Cr含量对膜的组成、微观结构、表面形貌、力学性能和摩擦学性能的影响。结果表明，随着Cr含量从1.49原子%增加到40.11原子%，Cr-DLC薄膜由类金属Cr弥散分布的非晶态DLC转变为碳化物相嵌入DLC基体的复合型DLC，薄膜表面形貌也由平坦表面演变为具有较大小丘的粗糙表面。非晶态Cr-DLC膜具有较低的摩擦系数和磨损率，而复合Cr-DLC膜具有较高的摩擦系数和磨损率，但硬度较高。(C)2010爱思唯尔有限公司版权所有。
Cr-containing diamond-like carbon (Cr-DLC) films was deposited on silicon wafers by a hybrid beams system, which consists of a DC magnetron sputtering and a linear ion source. The chromium content in the films was adjusted by varying the fraction of Ar in the Ar and CH4 gas mixture. The composition, microstructure, surface morphology, mechanical properties and tribological behavior of the films were investigated by XPS, TEM, AFM, SEM, nano-indentation and tribological tester as a function of Cr content. It is shown that, as the Cr content increased from 1.49 to 40.11 at.%, the Cr-DLC films transfer from amorphous DLC with dispersed metallic-like Cr to composite DLC with carbide phases embedding in the DLC matrix, and the film surface morphology also evolve from flat surface into rough surface with larger hillocks. The amorphous Cr-DLC films exhibit a low friction coefficient and wear rate as pure DLC, while the composite Cr-DLC films show a higher friction coefficient and wear rate, although they possess a relatively high hardness. (C) 2010 Elsevier Ltd. All rights reserved.