INTEGRATED OPTICAL RING-RESONATOR WITH MICROMECHANICAL DIAPHRAGM FOR PRESSURE SENSING
INTEGRATED OPTICAL RING-RESONATOR WITH MICROMECHANICAL DIAPHRAGM FOR PRESSURE SENSING
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DOI：
10.1109/68.285575
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发表时间：
1994-05-01
影响因子：
2.6
通讯作者：
BEHEIM, G
中科院分区：
文献类型：
--
作者：
DEBRABANDER, GN;BOYD, JT;BEHEIM, G
已经制造出一种光学压力传感器，它使用集成光学环形谐振器来测量微机械硅膜片中引起的应变。从与氮氧化硅光波导相对的一侧蚀刻硅衬底以产生矩形膜片，其长边位于环中的直部分下方。使用扫频激光二极管测量压力引起的环谐振频率变化。 TM 模式观察到对压力的线性响应，灵敏度为 0.0094 rad/kPa。该压力传感器坚固耐用，适合批量制造，并且提供对链路不敏感的读数。
An optical pressure sensor has been fabricated which uses an integrated-optical ring resonator to measure the strain induced in a micromachined silicon diaphragm. A silicon substrate is etched from the side opposite the silicon oxynitride optical waveguides to produce a rectangular diaphragm whose long edge lies underneath a straight section in the ring. Pressure-induced changes in the resonant frequency of the ring are measured using a frequency swept laser diode. A linear response to pressure is observed for the TM mode with a sensitivity of 0.0094 rad/kPa. This pressure sensor is rugged, is amenable to batch fabrication, and it provides a link-insensitive readout.