Online Measurement of Micro-Aspheric Surface with Compensation of Scanning Error
Online Measurement of Micro-Aspheric Surface with Compensation of Scanning Error
复制标题
扫描误差补偿的微非球面在线测量
DOI:
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发表时间:
2008
期刊:
影响因子:
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通讯作者:
W. Gao
中科院分区:
文献类型:
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作者:
Y. Arai;A. Shibuya;Y. Yoshikawa;W. Gao