Tribological properties of Cr-Si-N nanocomposite film adherent silicon under various environments
Tribological properties of Cr-Si-N nanocomposite film adherent silicon under various environments
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DOI：
10.1016/j.tsf.2010.05.035
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发表时间：
2010-10-01
期刊：
影响因子：
2.1
通讯作者：
Lee, Jyh-Wei
中科院分区：
文献类型：
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作者：
Lin, Hsin-Han;Chou, Chau-Chang;Lee, Jyh-Wei
氮化铬薄膜具有良好的耐蚀性和力学性能。然而，它们的硬度略低于其他硬质涂层。采用纳米复合薄膜的概念，通过添加硅形成具有增强的硬度和耐磨性的Cr-Si-N薄膜。采用双极对称脉冲直流反应磁控溅射法在硅片上制备了不同Si含量的Cr-Si-N薄膜，以提高其摩擦学性能和耐蚀性。采用销-盘摩擦磨损试验机研究了其摩擦学性能。在三种不同的环境下，在相同的操作条件下进行测试。它们分别在环境大气（在55%湿空气中）、去离子水和0.01 M NaCl水溶液中进行。磨损试验表明，随着硅含量的增加，Cr-Si-N膜层虽然具有较好的耐蚀性能，但耐磨性能却有所下降。结果表明，Cr-Si-N薄膜的硬度和韧性与其微观结构和与Si基体的结合力无关。(C)2010 Elsevier BV保留所有权利。
Chromium nitride thin films have good corrosion resistance and mechanical properties. However, their hardness is slightly lower than that of other hard coatings. The concept of nanocomposite thin films is employed by adding silicon to form Cr-Si-N thin films with enhanced hardness and wear resistance. In this study, Cr-Si-N films with various Si contents were coated on silicon wafer to enhance the tribological properties and anticorrosion by a bipolar symmetry pulsed DC reactive magnetron sputtering process. The tribological properties were studied by a pin-on-disk tester. The tests were conducted with the same operating condition under three different environments. They were performed in the ambient atmosphere (in 55% humid air), DI water, and 0.01 M NaCl aqueous solution, respectively. The wear tests revealed that, as the silicon content was increased, even though the Cr-Si-N films had a better anticorrosion property they had an inferior performance on wear resistance. The results were concluded to be mainly due to Cr-Si-N films' microstructures and adhesion to the Si substrate rather than their hardness and toughness. (C) 2010 Elsevier B.V. All rights reserved.