Bulk acoustic wave resonator based wireless and passive pressure sensor
Bulk acoustic wave resonator based wireless and passive pressure sensor
复制标题
基于体声波谐振器的无线无源压力传感器
DOI：
10.1016/j.vacuum.2020.109433
复制
发表时间：
2020-08-01
期刊：
影响因子：
4
通讯作者：
Luo, Jikui
中科院分区：
文献类型：
--
作者：
Xuan, Weipeng;Chen, Jin;Luo, Jikui
在这项工作中，提出了一种基于薄膜体声波谐振器（FBAR）的无线无源压力传感器并进行了实验研究。进行有限元分析 (FEA) 以确定装置中薄膜的振动机制和模式。 FBAR器件采用传统的MEMS工艺制造，压力传感器是通过将器件的回蚀腔密封在玻璃基板上而获得的。网络分析仪用于表征传感器的无线和无源性能。结果表明，通过无线测量传感器的频移可以检测周围环境的压力变化。该传感器具有约1 s的快速响应时间，压力灵敏度为1.5 ppm/kPa，在25℃温度下17 kPa至200 kPa的压力范围内具有0.997的优异线性度。此外，该传感器还具有随温度变化的优异线性频率响应，展示了其在无线无源传感应用中的潜力。
In this work, a wireless and passive pressure sensor based on film bulk acoustic wave resonator (FBAR) has been proposed and investigated experimentally. Finite element analysis (FEA) was performed to determine the vibration mechanism and modes of the film in the device. The FBAR device was fabricated using traditional MEMS process and the pressure sensor was obtained by sealing the back-etched cavity of the device on a glass substrate. The network analyzer was used to characterize the wireless and passive performance of the sensor. The results showed that the pressure variation of the surroundings can be detected by measuring the frequency shift of the sensor wirelessly. The sensor has a fast response time of about 1 s, and a pressure sensitivity of 1.5 ppm/kPa with an excellent linearity of 0.997 in the pressure range from 17 kPa to 200 kPa at the temperature of 25 degrees C. Moreover, the sensor also possesses an excellent linearity frequency response with temperature change, demonstrated its potential for wireless passive sensing applications.