Measurement of Rotational Populations of CH Radicals in Low-Temperature Plasmas
Measurement of Rotational Populations of CH Radicals in Low-Temperature Plasmas
复制标题
低温等离子体中 CH 自由基旋转种群的测量
DOI：
10.1143/jjap.42.1776
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发表时间：
2003
影响因子：
1.5
通讯作者：
S. Tanaka
中科院分区：
文献类型：
--
作者：
Hiroyuki Kobayashi;S. Kado;B. Xiao;S. Tanaka
利用高分辨率可见光谱仪和等离子体（MAP）-II装置，在低温氦等离子体中，测量了甲烷注入材料和等离子体（MAP）-II装置中CH自由基A2Δ态的转动布居. A2Δ态的转动布居数具有双麦克斯韦分布的特征，具有不同的转动温度THOT和TCOLD。这两个组件的旋转温度下降，通过碰撞与背景氦。发射强度对等离子体参数的依赖关系表明，在本实验中讨论0.24 ~ 1.2Pa压力范围内CH自由基的离解过程时，应考虑甲烷离子与氦离子的电荷交换电离产生的甲烷离子的离解复合。
Rotational population of CH radicals in A2Δ state was measured using a high resolution visible spectrometer in low-temperature helium plasmas with methane injection in materials and plasma (MAP)-II device. The rotational population in the A2Δ state is characterized by bi-Maxwellian distributions with different rotational temperatures, THOT and TCOLD. The rotational temperatures of both components decreased through collisions with background helium. The dependence of emission intensity on plasma parameters suggests that dissociative recombination of methane ions, which are ionized by charge exchange of methane with helium ions should be taken into account in the discussion of the dissociation processes in CH radicals in the pressure regime from 0.24 to 1.2 Pa in this experiment.