Development of a Sharp-Tipped L-Shaped Stylus for Measurement of Nanoscale Sidewall Features
Development of a Sharp-Tipped L-Shaped Stylus for Measurement of Nanoscale Sidewall Features
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DOI：
10.20965/ijat.2022.p0489
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发表时间：
2022-07
期刊：
影响因子：
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通讯作者：
Kosuke Uchiyama;H. Murakami;A. Katsuki;T. Sajima
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作者：
Kosuke Uchiyama;H. Murakami;A. Katsuki;T. Sajima
本文介绍了一种用L笔尖尖测量纳米尺寸侧壁特征的系统。通过将触针的尖端锐化到纳米级，就有可能测量纳米级的侧壁特征。当锋利的笔尖接触到被测表面时，笔轴会偏转，这种偏转是用光学方法测量的。在本研究中，我们开发了一种直径20μm、长4 mm的L形状锐化触针的制作方法，该方法通过刻蚀、二氧化碳激光加工和键合来实现。然后，通过测量具有纳米级特征的V型槽来检验测量精度和重复性。结果表明，针尖间距约为0.3μm，与照相测量值基本一致，而激光加工和键合的针尖深度分别约为0.15μm和0.0 7μm。通过粘接制造的触针测量的深度比从图像测量的深度(约0.16μm)要小，这可能是因为形态过滤器。在扫描模式下，用CO_2激光加工和粘接制作的测针进行10次测量的最大重复性误差分别在±0.056和±0.022μm以内。还证实，即使在进行了500次测量后，触针笔尖的磨损也是最小的。
This paper presents a system for measuring nanoscale sidewall features using an L-shaped stylus with a sharp tip. By sharpening the tip of the stylus to the nanometer scale, it is possible to measure nanoscale sidewall features. The stylus shaft is deflected when the sharpened stylus tip contacts the measured surface, and this deflection is measured optically. In this study, we develop the fabrication method of an L-shaped sharpened stylus 20 μm in diameter and 4 mm in length by etching, CO2 laser processing, and bonding. Then, the measurement accuracy and repeatability are examined by measuring V-grooves with nanoscale features. The results clarify that the pitch is approximately 0.3 μm, which is almost the same as the value measured using the photographic image, but the depths measured by the styli fabricated by CO2 laser processing and bonding are approximately 0.15 and 0.07 μm, respectively. The depth measured by the stylus fabricated by bonding is smaller than that measured from the image (approximately 0.16 μm), presumably because of the morphological filter. The maximum repeatability errors for 10 measurements using the styli fabricated by CO2 laser processing and bonding are within ±0.056 and ±0.022 μm in scanning mode, respectively. It is also confirmed that the stylus tip exhibits minimal wear even after 500 measurements.