Behavior of debris from laser-produced plasma for extreme ultraviolet light source measured by laser imaging technique
Behavior of debris from laser-produced plasma for extreme ultraviolet light source measured by laser imaging technique
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DOI：
10.1063/1.2362591
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发表时间：
2006-11
影响因子：
4
通讯作者：
Hiroki Tanaka;Y. Hashimoto;K. Tamaru;A. Takahashi;T. Okada
中科院分区：
文献类型：
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作者：
Hiroki Tanaka;Y. Hashimoto;K. Tamaru;A. Takahashi;T. Okada
利用激光诱导荧光（LIF）成像系统研究了13.5nm极紫外光源下激光等离子体（LPP）产生的碎片的行为。用Nd:YAG激光束垂直照射平坦的锡板和锡薄膜，制备了锡（Sn） LPPs。当使用锡薄膜作为靶材料时，沿Nd:YAG激光束可以清楚地观察到锡原子的耗尽。LIF系统还用于观察等离子体产生的快速离子对镜面衬底的溅射过程。
The behavior of debris generated from a laser-produced plasma (LPP) for the extreme ultraviolet light source at 13.5nm has been studied using a laser induced fluorescence (LIF) imaging system. Tin (Sn) LPPs were produced by irradiating a flat Sn plate and Sn thin films perpendicularly with a Nd:YAG laser beam. When a thin Sn film was used as a target material, the depletion of the Sn atoms was clearly observed along the Nd:YAG laser beam. The LIF system was also used for visualizing the sputtering process of a mirror substrate by the fast ions generated from the plasma.