Effect of crystallization on humidity sensing properties of sol-gel derived nanocrystalline TiO2 thin films
Effect of crystallization on humidity sensing properties of sol-gel derived nanocrystalline TiO2 thin films
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DOI：
10.1016/j.tsf.2007.06.147
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发表时间：
2008-02-29
期刊：
影响因子：
2.1
通讯作者：
Jain, Mahaveer K.
中科院分区：
文献类型：
--
作者：
Biju, Kuyyadi P.;Jain, Mahaveer K.
在目前的工作中，我们描述了晶化的纳米TiO 2薄膜的湿敏性能的溶胶-凝胶技术制备的影响。在这里，我们报告的相对湿度（RH）的敏感性增强后，在375摄氏度的结晶，这是由于增加的表面活性接近结晶和较低的微晶尺寸。晶化后，RH敏感性被发现随着晶粒尺寸的增加而降低。复阻抗的传感器，使用阻抗谱测量，适合与等效电路组成的颗粒间的电阻和电容并联。结果发现，随着RH的变化，只有电阻变化显着，当与电容相比。(C)2007 Elsevier B. V.保留所有权利。
In the present work, we describe the effect of crystallization on humidity sensing properties of nanocrystalline TiO2 thin films prepared by sol-gel techniques. Here, we report an enhancement in the relative humidity (RH) sensitivity just after the crystallization at 375 degrees C, which is attributed to increased surface activity near crystallization and lower crystallite size. After crystallization, the RH sensitivity was found to decrease with increasing grain size. The complex impedance of the sensor, measured using impedance spectroscopy, fits well with an equivalent circuit consisting of inter-granular resistance and capacitance in parallel. It was found that with the change in RH, only resistance changes significantly, when compared with the capacitance. (C) 2007 Elsevier B.V. All rights reserved.