Thickness Measurements of Thin Perfluoropolyether Polymer Films on Silicon and Amorphous-Hydrogenated Carbon with X-Ray Reflectivity, ESCA and Optical Ellipsometry.
Thickness Measurements of Thin Perfluoropolyether Polymer Films on Silicon and Amorphous-Hydrogenated Carbon with X-Ray Reflectivity, ESCA and Optical Ellipsometry.
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使用 X 射线反射率、ESCA 和光学椭圆光度法测量硅和非晶氢化碳上的全氟聚醚聚合物薄膜的厚度。
DOI：
10.1006/jcis.2000.6752
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发表时间：
2000
影响因子：
9.9
通讯作者：
Pocker
中科院分区：
文献类型：
--
作者：
Toney;Maté;Leach;Pocker
用于测量薄膜的结构参数，如厚度，密度和覆盖率的实验技术提供了重要的见解，这些薄膜的物理性质。结构参数也经常被用来预测薄膜的最终性能。在这项研究中，我们使用三种不同的测量技术-X射线反射率（XRR），电子能谱化学分析（ESCA），和光学椭圆偏振测量的厚度的分子薄全氟聚醚（PFPE）聚合物薄膜的硅基板和碳涂层。PFPE膜通常用于润滑磁记录装置中的表面。在这里，我们使用XRR来测量薄膜的绝对厚度，这反过来又被用来测试ESCA和椭偏厚度测量的有效性。这三种方法之间有很好的一致性，前提是在ESCA（单MFP模型）中将25-π电子平均自由程（MFP）用于PFPE膜和衬底，在椭圆偏振法中使用体PFPE折射率，并且适当考虑偶然吸附的烃。版权所有2000学术出版社。
Experimental techniques used to measure structural parameters of thin films such as thickness, density, and coverage provide important insights into the physical properties of these films. Structural parameters are also often used to predict the eventual performance of thin films. In this study, we use three different measurement techniques-X-ray reflectivity (XRR), electron spectroscopy for chemical analysis (ESCA), and optical ellipsometry-to measure the thickness of molecularly thin perfluoropolyether (PFPE) polymer films on silicon substrates and carbon overcoats. PFPE films are commonly used to lubricate surfaces in magnetic recording devices. Here, we use XRR to measure the absolute thickness of the films, which, in turn, is used to test the validity of ESCA and ellipsometry thickness measurements. Excellent agreement is found among the three methods, provided that a 25-Å electron mean-free path (MFP) is used for the PFPE film and the substrate in ESCA (single MFP model), that the bulk PFPE refractive index is used in ellipsometry, and that adventitiously adsorbed hydrocarbons are properly taken into account. Copyright 2000 Academic Press.