Computational study of the dynamics of two interacting bubbles in a megasonic field
Computational study of the dynamics of two interacting bubbles in a megasonic field
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DOI：
10.1016/j.ultsonch.2015.04.005
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发表时间：
2015-09-01
影响因子：
8.4
通讯作者：
Ishimoto, Jun
中科院分区：
文献类型：
--
作者：
Ochiai, Naoya;Ishimoto, Jun
阐明超音速清洗去除颗粒的机理，控制超声场中的空化气泡，对于无图案损伤的纳米器件清洗是至关重要的。多个气泡的相互作用使颗粒去除的机理变得复杂。因此，了解多个气泡的动力学特性对于阐明超音速清洗去除颗粒的机理具有重要意义。本文采用气液两相介质的可压缩局部均匀模型，对具有多个初始半径和初始分离距离的高超声速场中两个气泡的动力学进行了数值模拟。该数值方法模拟了两个气泡的各种复杂行为，包括排斥运动、聚并、分离距离的周期和稳定运动以及气泡的破裂。初始分离距离对两个气泡的行为有很大影响，因为一个气泡振荡产生的二次压力对另一个气泡的影响取决于分离距离。特别是，当平衡半径大于共振半径，且一个或两个气泡的半径接近共振半径时，气泡可以表现出分离距离的周期性、稳定运动等特征行为。(C)2015爱思唯尔B.V.保留所有权利。
Clarification of the mechanism of particle removal by megasonic cleaning and control of cavitation bubbles in the megasonic field are essential for cleaning of nanodevices without pattern damage. Multiple bubble interactions complicate the mechanism of particle removal. Therefore, it is important to understand multiple bubble dynamics to clarify the mechanism of particle removal by megasonic cleaning. In the present study, the dynamics of two bubbles in a megasonic field with several initial radii and initial separation distances were simulated by numerical analysis using a compressible locally homogeneous model of a gas-liquid two-phase medium. The present numerical method simulated the various complex behaviors of two bubbles, which are repulsive motion, coalescence, periodic and stable motion of the separation distance, and bubble breakup. The initial separation distance strongly affected the behavior of the two bubbles because the effect of the secondary pressure induced by the oscillation of one bubble on the other bubble depends on the separation distance. In particular, when the equilibrium radii are larger than the resonant radius and the radius of one or both bubbles is close to the resonant radius, the bubbles can show characteristic behaviors, such as periodic and stable motion of the separation distance. (C) 2015 Elsevier B.V. All rights reserved.