Multimodal microscopy test standard for scanning microwave, electron, force and optical microscopy
Multimodal microscopy test standard for scanning microwave, electron, force and optical microscopy
复制标题
DOI:
10.1007/s12213-018-0108-z
复制
发表时间:
2018-06
影响因子:
2.3
通讯作者:
O. Haenssler;M. F. Wieghaus-;A. Kostopoulos;G. Doundoulakis;E. Aperathitis;S. Fatikow;G. Kiriakidis
中科院分区:
文献类型:
--
作者:
O. Haenssler;M. F. Wieghaus-;A. Kostopoulos;G. Doundoulakis;E. Aperathitis;S. Fatikow;G. Kiriakidis
We report on measurement results of a test standard suitable for different microscopic modalities. These findings were obtained by a multimodal hybrid microscope, which requires various calibration methods, also in terms of its further use as a tool in a nanorobotic environment. A Scanning Probe Microscopy (SPM)-Controller based on an FPGA (Field Programmable Gate Array) enables the submicrometer imaging for atomic force and microwave microscopic modalities. It is embedded in an open source software framework for nanorobotics and -automation and is described in this report.