Anti-Reflective Porous Silicon Features by Substrate Conformal Imprint Lithography for Silicon Photovoltaic Applications

Anti-Reflective Porous Silicon Features by Substrate Conformal Imprint Lithography for Silicon Photovoltaic Applications
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用于硅光伏应用的基板共形压印光刻的抗反射多孔硅特性

DOI:
10.4028/www.scientific.net/msf.806.109
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发表时间:
2014
期刊:
Materials Science Forum
影响因子:
--
通讯作者:
Blayney G
Blayney G
中科院分区:
--
文献类型:
--
作者:
Blayney G

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