Tensile Film Stress of Parylene Deposited on Liquid
Tensile Film Stress of Parylene Deposited on Liquid
复制标题
DOI：
10.1021/la102790w
复制
发表时间：
2010-12-21
期刊：
影响因子：
3.9
通讯作者：
Shimoyama, Isao
中科院分区：
文献类型：
--
作者：
Binh-Khiem, Nguyen;Matsumoto, Kiyoshi;Shimoyama, Isao
我们发现，直接沉积在液面上的聚对二甲苯包裹的液滴在聚对二甲苯沉积过程中向球形变形。这种变形表明，薄膜的应力是拉应力。通过研究液滴形状的表面平均曲率，计算了这种聚对二甲苯薄膜的薄膜应力，测得薄膜应力约为0.7-0.9 Mpa拉伸应力。这种薄膜应力与沉积在固体衬底上的聚对二甲苯薄膜的应力类型相反，是压缩的。这种差异可能表明，由于使用液面作为沉积衬底，聚对二甲苯聚合物发生了深刻的变化。拉伸薄膜应力及其对液滴形状的影响在具有微透镜或微泵等封装液体结构的对二甲苯微器件的制造和操作中也有意义。
We found that liquid droplets encapsulated by Parylene deposited directly on a liquid surface deformed toward spherical shapes during Parylene deposition. This deformation suggested that the film stress was tensile. We calculated the film stress of such Parylene films by studying the surface mean curvature of the droplet shape and found the film stress measured about 0.7-0.9 MPa tensile. This film stress is of opposite type to that of as-deposited Parylene films deposited on solid substrates, which was compressive. This difference might indicate a profound change of the Parylene polymer due to the use of liquid surface as deposition substrate. The tensile film stress and its effect on the droplet shape also have implications in the fabrication and operation of Parylene microdevices that have encapsulated liquid structures such as microlens or micropumps.