High resolution, high speed ultrahigh vacuum microscopy

High resolution, high speed ultrahigh vacuum microscopy
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高分辨率、高速超高真空显微镜

DOI:
10.1116/1.1786304
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发表时间:
2004
期刊:
Journal of Vacuum Science and Technology
影响因子:
--
通讯作者:
H. Poppa
H. Poppa
中科院分区:
--
文献类型:
--
作者:
H. Poppa

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透射电子显微镜(TEM)的历史和未来进行了讨论,因为它是指最终的发展适用于真实的时间在现场调查的表面处理与高分辨率的仪器和技术。为了实现这一目标,有必要改造传统的高分辨率仪器,以便在样品现场创建一个超真空(UHV)环境,通过各种原位样品修改程序提供对样品的访问,并与其他集成表面分析系统进行原位样品交换成为可能。此外,必须开发高分辨率图像采集系统以利用投影成像显微镜的高速成像能力。传统电子显微镜及其用途的这些变化在近40年的时间里在一些国际实验室中慢慢实现,这些实验室由相对少数的研究人员对推进电子显微镜的发展非常感兴趣。
The history and future of transmission electron microscopy (TEM) is discussed as it refers to the eventual development of instruments and techniques applicable to the real time in situ investigation of surface processes with high resolution. To reach this objective, it was necessary to transform conventional high resolution instruments so that an ultrahigh vacuum (UHV) environment at the sample site was created, that access to the sample by various in situ sample modification procedures was provided, and that in situ sample exchanges with other integrated surface analytical systems became possible. Furthermore, high resolution image acquisition systems had to be developed to take advantage of the high speed imaging capabilities of projection imaging microscopes. These changes to conventional electron microscopy and its uses were slowly realized in a few international laboratories over a period of almost 40 years by a relatively small number of researchers crucially interested in advancing the state of the...
DOI: 10.1038/27399
发表时间: 1998-10-22
期刊: NATURE
影响因子: 64.8
作者:
Ohnishi, H;Kondo, Y;Takayanagi, K
通讯作者: Takayanagi, K