Development of Ni-based superalloys for microelectromechanical systems
Development of Ni-based superalloys for microelectromechanical systems
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DOI：
10.1016/j.scriptamat.2012.06.003
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发表时间：
2012-09-01
影响因子：
6
通讯作者：
Hemker, Kevin J.
中科院分区：
文献类型：
--
作者：
Burns, Devin E.;Zhang, Yong;Hemker, Kevin J.
电沉积的LIGA Ni微拉伸试样是微机电系统部件的代表，采用传统的扩散镀铝工艺进行气相镀铝。随后的热处理导致Al在整个试样中均匀化，并产生沉淀强化（γ - ni + γ′-Ni3Al）显微组织。这些组件的热稳定性和强度比传统的LIGA Ni材料有了显著的提高。微探针分析指出了组成在决定这些材料的强度和延性方面的重要性。(C) 2012材料学报Elsevier Ltd.出版。版权所有。
Electrodeposited LIGA Ni microtensile specimens, representative of microelectromechanical systems components, have been vapor-phase aluminized with a process traditionally used to make diffusion aluminide coatings. Subsequent heat treatments resulted in homogenization of Al throughout the specimens and production of a precipitation-strengthened (gamma-Ni + gamma'-Ni3Al) microstructure. The thermal stability and strength of these components represent a significant improvement over traditional LIGA Ni materials. Microprobe analysis points to the importance of composition in determining strength and ductility of these materials. (C) 2012 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.