Epitaxial growth of body‐centered‐cubic transition metal films and superlattices onto MgO (111), (011), and (001) substrates

Epitaxial growth of body‐centered‐cubic transition metal films and superlattices onto MgO (111), (011), and (001) substrates
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DOI:
10.1116/1.579410
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发表时间:
1995-03
期刊:
Journal of Vacuum Science and Technology
影响因子:
--
通讯作者:
J. Mattson;E. Fullerton;C. H. Sowers;S. Bader
J. Mattson;E. Fullerton;C. H. Sowers;S. Bader
中科院分区:
其他
文献类型:
--
作者:
J. Mattson;E. Fullerton;C. H. Sowers;S. Bader

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我们展示了通过溅射到单晶MgO衬底上外延生长体心立方过渡金属Nb、Mo、Fe和Cr。当生长到MgO(111)、(011)和(001)上时,外延生长取向分别为(011)、(112)和(001)。此外,我们证明,在适当的生长条件下,这些材料的超晶格(例如,Fe/Cr、Fe/V和Mo/V)可以以与膜相同的外延顺序生长。
We demonstrate epitaxial growth of the bcc transition metals Nb, Mo, Fe, and Cr via sputtering onto single crystal MgO substrates. The epitaxial growth orientations are (011), (112), and (001) when grown onto MgO (111), (011), and (001), respectively. Further, we demonstrate that, under appropriate growth conditions, superlattices of these materials (e.g., Fe/Cr, Fe/V, and Mo/V) can be grown with the same epitaxial order as the films.