Evaluation of spatial and temporal resolution on in situ annealing aberration-corrected transmission electron microscopy with proportional?integral?differential controller
Evaluation of spatial and temporal resolution on in situ annealing aberration-corrected transmission electron microscopy with proportional?integral?differential controller
复制标题
比例积分微分控制器原位退火像差校正透射电子显微镜时空分辨率评估
DOI：
10.1093/jmicro/dfz010
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发表时间：
2019
期刊：
影响因子：
1.8
通讯作者：
Konno J Toyohiko
中科院分区：
文献类型：
--
作者：
Shimada Yusuke;Yoshida Kenta;Inoue Koji;Shiraishi Takahisa;Kiguchi Takanori;Nagai Yasuyoshi;Konno J Toyohiko
透射电子显微镜（TEM）原位退火观察是研究热致组织变化的有效方法之一。为了将这种动态表征应用于通过离子研磨、电抛光或聚焦离子束（FIB）研磨机制造的体样品，通常需要使用加热罐型系统。我们在这里报告了一个初步的尝试，以提高空间和时间分辨率在thein-situannealing观察散装样品使用球差校正（AC）TEM与一个新的热控制单元。在350°C等温退火条件下，获得了1.5 μ m的信息限和2.0 μ m的点分辨率，与室温下的分辨率相当，温度变化对样品漂移的影响很大。样品以+1.0 ° C/s的加热速率加热，通过TV读出速度CCD相机观察到的漂移距离小于2.0 μ m/s。
Thein situannealing observation in transmission electron microscope (TEM) is one of the effective methods for imaging thermally induced microstructural changes. For applying this dynamical characterization to bulk samples fabricated by ion-milling, electro-polishing or focused ion beam (FIB) mill, it is generally needed to use a heating-pot type system. We here report an initial trial to improve the spatial and temporal resolution during thein-situannealing observation of bulk samples using a spherical aberration corrected (AC) TEM with a new thermal control unit. The information limit of 1.5 Å and the point resolution of 2.0 Å are achieved under isothermal annealing at 350°C, which is the same resolution at room temperature, and it is affected strongly of sample drift by the temperature variation. The sample is heated at a heating rate of +1.0°C/s, the drift distance observed by a TV readout speed CCD camera is less than 2.0 Å/s.