Elastic modulus measurement of multilayer metallic thin films
Elastic modulus measurement of multilayer metallic thin films
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DOI：
10.1557/jmr.1999.0269
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发表时间：
1999-05-01
影响因子：
2.7
通讯作者：
Kim, Y
中科院分区：
文献类型：
--
作者：
Cho, KH;Kim, Y
利用梁振动理论开发了两层和三层复合材料模型，并将该模型应用于测量金属薄膜的杨氏模量。通过射频（rf）磁控溅射制备了 Gr、Ni 和 Go 涂层的 Si 晶片复合材料（两层复合材料）和（Cr/Ti/Si）复合材料（三层复合材料），并用于测试所开发的模型。将（Ti/Si）视为一层，将（Gr）视为另一层，通过三层复合模型获得的（Gr）薄膜的杨氏模量与通过两层复合模型获得的（Gr）薄膜的杨氏模量非常吻合。这表明多层薄膜的模量可以通过重复使用两层复合模型来获得。
Two- and three-layer composite models were developed using a beam vibration theory, and the models were applied for measuring Young's moduli of thin metallic films. The Gr, Ni, and Go-coated Si wafer composites (two-layer composite) and (Cr/Ti/Si) composites (three-layer composite) were produced by radio-frequency (rf) magnetron sputtering and used to test the developed models. Young's moduli of (Gr) films obtained by the three-layer composite model agree well with those of (Gr) films obtained by the two-layer composite model, considering (Ti/Si) as the one layer and (Gr) as the other layer. This suggests that moduli of multilayer films may be obtained by using a two-layer composite model repeatedly.