Simultaneous observation of the diffusion of self-atoms and co-implanted boron and fluorine in pre-amorphized silicon investigated by isotope heterostructures
Simultaneous observation of the diffusion of self-atoms and co-implanted boron and fluorine in pre-amorphized silicon investigated by isotope heterostructures
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同位素异质结构同时观察预非晶硅中自原子和共注入硼、氟的扩散
DOI：
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发表时间：
2017
期刊：
影响因子：
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通讯作者：
Kohei M. Itoh
中科院分区：
文献类型：
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作者：
Ryotaro Kiga;Masashi Uematsu;Kohei M. Itoh
